Numerical study to characterize the damping of electrostatically actuated microbeams (online)
* Presenting author
Microelectromechanical Systems (MEMS) are a technology that has made completely new applications possible in science and industry. Microspeakers such as those used in in-ear devices have great potential to benefit from MEMS technology due to the miniaturization and manufacturing advantages. There is a lot of research going on in this area, where great efforts are made to avoid pull-in instabilities and to optimize damping. Damping in particular is a decisive factor in audio applications, as it has a strong influence on the frequency response. In this study, we use the finite element method to investigate the influence of the air film in the electrostatic gap of a test structure on parameters that can be measured using impedance spectrometry, such as mechanical natural frequency or capacitance. The results have the potential to improve the characterization methods and thus advance the development of MEMS-based microspeakers.