Article

Transmission behaviour and noise generation of MEMS shutter devices (vor Ort)

* Presenting author
Day / Time: 23.03.2022, 17:40-18:00
Room: 57-03
Typ: Regulärer Vortrag
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Abstract:

A new method of sound generation – which we call Advanced Digital Sound Reconstruction (ADSR) – incorporates a redirection mechanism for sound pulses. In the most simple case, these sound pulses have the shape of a hat-function and are manipulated via highly dynamic shutter gates. We investigate the influence of a particular Micro-Electro-Mechanical-Systems (MEMS) actuator design on this sound pulse regarding its transmission behaviour. Since viscous effects can play a dominant role in MEMS applications, we utilize the linearized flow equations in time domain in order to solve for the acoustic pressure while taking viscous boundary layers into account. Furthermore we investigate the generated noise during the switching process. The actuator itself has been characterized via a Micro System Analyzer 400 regarding its mechanical properties, which are then utilizied in a simplified simulation setup in order to estimate the generated sound pressure level. The simulated sound pressure level is then compared to acoustic measurements to validate the simplified approach. Based on the results regarding the transmission behaviour as well as the generated noise during the switching process, the underlying embodiment is rated regarding its applicability for ADSR.

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